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基于超平表面的原子力显微镜探针磨损研究
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作者单位
柯丁宁,况婷,宋琳琳,黄梦诗,高尚 1.哈尔滨工业大学(深圳) 实验与创新实践教育中心2.哈尔滨工业大学(深圳)材料科学与工程学院 
基金项目:哈尔滨工业大学(深圳)课程建设资助项目(HITSZUCP18020)
中文摘要:探针磨损是影响原子力显微镜图像质量的关键因素之一。为了研究原子力显微镜(AFM)探针针尖磨损问题,选取超平表面(Rq<05 nm)作为测试样品,采用材料表面的粗糙度(Rq)评估探针针尖磨损效率。在较低的探针悬臂目标振幅比例(10%),较低反馈回路设定值比例(10%),较低扫描速度(10 Hz)以及适中I-gain(17)的测试条件下,探针的磨损最小,可以有效地延长探针的使用寿命。最后利用扫描电镜对比了不同测试条件下探针针尖的形貌,推测了探针针尖在连续测试中磨损与断裂的机理。
中文关键词:原子力显微镜  针尖磨损  粗糙度  轻敲模式
 
Study on Tip Wear of Atomic Force Microscope Using Ultra-flat Surface
Abstract:Tip wear of atomic force microscope(AFM) is a crucial factor to influence AFM image quality.In order to investigate the tip wear of AFM,the ultra flat glass surface with a roughness(Rq) lower than 05 nm was selected as the scanning sample,which was used for the efficiency assessment of tip wear.Under the test conditions,such as low target amplitude ratio(10%) for probe cantilever,low set point amplitude ratio(10%),low scanning speed(10 Hz) and moderate I-gain(17),the tip wear of the probe was minimal,which could effectively extend the service life of the probe.Furthermore,the mechanism for tip fracture and wear in the test process was speculated by comparing the morphologies of the probe tip of scanning electron microscope(SEM) in different test situations.
Key Words:atomic force microscope(AFM)  tip wear  roughness  tapping mode
引用本文:柯丁宁,况婷,宋琳琳,黄梦诗,高尚.基于超平表面的原子力显微镜探针磨损研究[J].分析测试学报,2019,(7):870-873.
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